Texture and Surface Morphology Effects on Tetragonal Phase Stabilization in ZrO2 Films Deposited by Metal-Organic Chemical Vapor Deposition
- 期刊名称Journal of Nanoscience and Nanotechnology
- 作者Chen, Zhe; Prud'homme, Nathalie; Wang, Bin; Ribot, Patrick; Ji, Vincent
- 卷第11卷
- 期第9期
- 印刷ISSN1533-4880
- 电子ISSN1533-4899
- 文件大小2692.04KB
- 发表时间2011-09-01
- DOI10.1166/jnn.2011.5059
- 页码8264-8268
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