Correlating Microscale Thermal Conductivity of Heavily-Doped Silicon With Simultaneous Measurements of Stress
- 期刊名称Journal of Engineering Materials and Technology
- 作者Gan, Ming; Tomar, Vikas
- 卷第133卷
- 期第4期
- 印刷ISSN0094-4289
- 文件大小1022.06KB
- 发表时间2011
- DOI10.1115/1.4004699
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