$Measurement of strain and strain relaxation in free-standing Si membranes by convergent beam electron diffraction and finite element method$

Measurement of strain and strain relaxation in free-standing Si membranes by convergent beam electron diffraction and finite element method

H. Gao; K. Ikeda; S. Hata; H. Nakashima; D. Wang; H. Nakashima

发现好书期刊，享受阅读乐趣