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Freeform lens for off-axis illumination in optical lithography system

Freeform lens for off-axis illumination in optical lithography system

Rengmao Wu; Zhenrong Zheng; Haifeng Li; Xu Liu

作者Rengmao Wu; Zhenrong Zheng; Haifeng Li; Xu Liu
卷第284卷
期第12期
印刷ISSN0030-4018
文件大小949.12KB
发表时间2011
DOI10.1016/j.optcom.2011.02.028
页码2662-2667

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