Lithographically patterned silicon nanostructures on silicon substrates
- 作者Nacéra Megouda; Gaëlle Piret; Elisabeth Galopin; Yannick Coffinier; Toufik Hadjersi; Omar Elkechai; Rabah Boukherroub
- 卷第258卷
- 期第16期
- 印刷ISSN0169-4332
- 文件大小1155.73KB
- 发表时间2012
- DOI10.1016/j.apsusc.2012.02.085
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