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Physical properties of sputtered amorphous carbon coating

Physical properties of sputtered amorphous carbon coating

M. Yari; M.M. Larijani; A. Afshar; M. Eshghabadi; A. Shokouhy

作者M. Yari; M.M. Larijani; A. Afshar; M. Eshghabadi; A. Shokouhy
卷第513卷
印刷ISSN0925-8388
文件大小564.14KB
发表时间2012
DOI10.1016/j.jallcom.2011.10.006

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