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Structural and mechanical properties of Cr–Al–O–N thin films grown by cathodic arc deposition

Structural and mechanical properties of Cr–Al–O–N thin films grown by cathodic arc deposition

A. Khatibi; J. Sjölen; G. Greczynski; J. Jensen; P. Eklund; L. Hultman
  • 作者A. Khatibi; J. Sjölen; G. Greczynski; J. Jensen; P. Eklund; L. Hultman
  • 卷第60卷
  • 期第19期
  • 文件大小2662.68KB
  • 发表时间2012
  • DOI10.1016/j.actamat.2012.08.010
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