An Atomic Layer Deposition Method to Fabricate Economical and Robust Large Area Microchannel Plates for Photodetectors
Anil U. Mane; Qing Peng; Jeffrey W. Elam; Daniel C. Bennis; Christopher A. Craven; Michael A. Detarando; John R. Escolas; Henry J. Frisch; Slade J. Jokela; Jason McPhate; Michael J. Minot; Oswald H.W. Siegmund; Joseph M. Renaud; Robert G. Wagner; Matthew J. Wetstein
- 作者Anil U. Mane; Qing Peng; Jeffrey W. Elam; Daniel C. Bennis; Christopher A. Craven; Michael A. Detarando; John R. Escolas; Henry J. Frisch; Slade J. Jokela; Jason McPhate; Michael J. Minot; Oswald H.W. Siegmund; Joseph M. Renaud; Robert G. Wagner; Matthew J. Wetstein
- 卷第37卷
- 文件大小1041.58KB
- 发表时间2012
- DOI10.1016/j.phpro.2012.03.720