A Low-Flicker-Noise MEMS Electrothermal Displacement Sensing Technique
- 期刊名称Journal of Microelectromechanical Systems
- 作者Mohammadi, A.; Yuce, M. R.; Moheimani, S. O. R.
- 卷第21卷
- 期第6期
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小405.74KB
- 发表时间2012-12
- DOI10.1109/JMEMS.2012.2219296
- 页码1279-1281
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