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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Wafer-level processing for polymer-based planar micro cryogenic coolers

[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Wafer-level processing for polymer-based planar micro cryogenic coolers

Wang, Y. D.; Lewis, R.; Lin, M.-H.; Radebaugh, R.; Lee, Y. C.

作者Wang, Y. D.; Lewis, R.; Lin, M.-H.; Radebaugh, R.; Lee, Y. C.
文件大小2012.99KB
发表时间2012
DOI10.1109/MEMSYS.2012.6170205
页码341-344

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