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Fabrication of nickel micro-parts using liquid–crystal-display projection lithography and newly developed pattern transfer process

Fabrication of nickel micro-parts using liquid–crystal-display projection lithography and newly developed pattern transfer process

Horiuchi, Toshiyuki; Shiratori, Sho

期刊名称Microelectronic Engineering
作者Horiuchi, Toshiyuki; Shiratori, Sho
卷第98卷
印刷ISSN0167-9317
文件大小903.88KB
发表时间2012-10
DOI10.1016/j.mee.2012.06.017
页码574-577

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