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Linear-Stiffness Rotary MEMS Stage

Baran, Utku; Davis, Wyatt O.; Holmstrom, Sven; Brown, Dean; Sharma, Jaibir; Gokce, Sertan Kutal; Urey, Hakan

期刊名称Journal of Microelectromechanical Systems
作者Baran, Utku; Davis, Wyatt O.; Holmstrom, Sven; Brown, Dean; Sharma, Jaibir; Gokce, Sertan Kutal; Urey, Hakan
卷第21卷
期第3期
印刷ISSN1057-7157
电子ISSN1941-0158
文件大小242.66KB
发表时间2012-06
DOI10.1109/JMEMS.2011.2182504
页码514-516