High $Q$ Single Crystal Silicon Micromechanical Resonators With Hybrid Etching Process
Wu, Guoqiang; Xu, Dehui; Xiong, Bin; Wang, Yuelin
- 期刊名称IEEE Sensors Journal
- 作者Wu, Guoqiang; Xu, Dehui; Xiong, Bin; Wang, Yuelin
- 卷第12卷
- 期第7期
- 印刷ISSN1530-437X
- 电子ISSN1558-1748
- 文件大小234.91KB
- 发表时间2012-07
- DOI10.1109/jsen.2012.2191772
- 页码2414-2415