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[IEEE 2012 IEEE International Reliability Physics Symposium (IRPS) - Anaheim, CA, USA (2012.04.15-2012.04.19)] 2012 IEEE International Reliability Physics Symposium (IRPS) - A study of the influence of electron beam on electrical characteristics of LOCOS device

[IEEE 2012 IEEE International Reliability Physics Symposium (IRPS) - Anaheim, CA, USA (2012.04.15-2012.04.19)] 2012 IEEE International Reliability Physics Symposium (IRPS) - A study of the influence of electron beam on electrical characteristics of LOCOS device

Hung Sung Lin, ; Chia Hung Chao,

作者Hung Sung Lin, ; Chia Hung Chao,
文件大小520.20KB
发表时间2012
DOI10.1109/irps.2012.6241904

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