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[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - Substrate engineering using Smart Cut<sup>TM</sup> and Smart Stacking<sup>TM</sup> for next-generation advanced LSIs

[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - Substrate engineering using Smart CutTM and Smart StackingTM for next-generation advanced LSIs

Yoshimi, Makoto; Cauchy, Xavier; Desbonnets, Eric; Radu, Ionut; Maleville, Christophe
  • 作者Yoshimi, Makoto; Cauchy, Xavier; Desbonnets, Eric; Radu, Ionut; Maleville, Christophe
  • 文件大小551.54KB
  • 发表时间2012
  • DOI10.1109/icsict.2012.6467819
  • 页码1-2
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