[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - Enhanced nitrogen plasma immersion passivation method for high-K/Ge stack formation
- 作者Lin, Meng; Yun, Quanxin; Li, Min; Li, Zhiqiang; An, Xia; Li, Ming; Zhang, Xing; Huang, Ru
- 文件大小305.75KB
- 发表时间2012
- DOI10.1109/icsict.2012.6467937
- 页码1-3
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