Mode-Localized Displacement Sensing
- 期刊名称Journal of Microelectromechanical Systems
- 作者Thiruvenkatanathan, P.; Seshia, A. A.
- 卷第21卷
- 期第5期
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小354.55KB
- 发表时间2012-10
- DOI10.1109/jmems.2012.2198047
- 页码1016-1018
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