Effect of Si and C concentration on the microstructure, and the mechanical, tribological and electrochemical properties of nanocomposite TiC/a-SiC:H/a-C:H coatings prepared by plasma enhanced chemical vapor deposition
- 期刊名称Journal of Applied Physics
- 作者Li, Duanjie; Hassani, Salim; Poulin, Suzie; Szpunar, Jerzy A.; Martinu, Ludvik; Klemberg-Sapieha, Jolanta E.
- 卷第111卷
- 期第4期
- 印刷ISSN0021-8979
- 文件大小2395.31KB
- 发表时间2012
- DOI10.1063/1.3684602
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