Fabrication and characterization of compact silicon oxynitride waveguides on silicon chips
Yin, Lianghong; Lu, Ming; Wielunski, Leszek; Song, Weiwei; Tan, Jun; Lu, Yicheng; Jiang, Wei
- 期刊名称Journal of Optics
- 作者Yin, Lianghong; Lu, Ming; Wielunski, Leszek; Song, Weiwei; Tan, Jun; Lu, Yicheng; Jiang, Wei
- 卷第14卷
- 期第8期
- 印刷ISSN2040-8978
- 电子ISSN2040-8986
- 文件大小2866.28KB
- 发表时间2012-08-01
- DOI10.1088/2040-8978/14/8/085501