Diffusion and Gettering of Transition Metals in 4H-SiC
- 期刊名称Materials Science Forum
- 作者Danno, Katsunori; Saitoh, H.; Seki, Akinori; Shirai, T.; Suzuki, Hiroshi; Bessho, T.; Kawai, Yoichiro; Kimoto, Tsunenobu
- 电子ISSN1662-9752
- 文件大小387.12KB
- 发表时间2012-5
- DOI10.4028/www.scientific.net/MSF.717-720.225
- 页码225-228
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