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The Polishing Technology for Glass Substrates Using Tribo-Chemical Reaction and Electrical Slurry Control

Ikeda, Hiroshi; Akagami, Yoichi; Uneda, Michio; Ohnishi, Osamu; Kurokawa, Syuhei; Doi, Toshiro K.

期刊名称Journal of The Electrochemical Society
作者Ikeda, Hiroshi; Akagami, Yoichi; Uneda, Michio; Ohnishi, Osamu; Kurokawa, Syuhei; Doi, Toshiro K.
卷第159卷
期第4期
印刷ISSN0013-4651
文件大小224.12KB
发表时间2012
DOI10.1149/2.063204jes