Extreme-ultraviolet source specifications: tradeoffs and requirements

• 期刊名称Journal of Micro/Nanolithography, MEMS, and MOEMS
• 作者Moors, Roel; Banine, Vadim; Swinkels, Geert; Wortel, Frans
• 卷第11卷
• 期第2期
• 印刷ISSN1932-5150
• 文件大小815.33KB
• 发表时间2012-05-21
• DOI10.1117/1.JMM.11.2.021102