Research on (Ti,Al)N Films Deposited by FCVA
- 期刊名称Advanced Materials Research
- 作者Zhou, You Long; Chen, Zhou; Ji, Sheng Xing; Nan, Huang; Huang, Nan
- 电子ISSN1662-8985
- 文件大小397.15KB
- 发表时间2012-7
- DOI10.4028/www.scientific.net/AMR.557-559.1893
- 页码1893-1896
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