MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers
Rissanen, Anna; Akujärvi, Altti; Antila, Jarkko; Blomberg, Martti; Saari, Heikki
- 期刊名称Journal of Micro/Nanolithography, MEMS, and MOEMS
- 作者Rissanen, Anna; Akujärvi, Altti; Antila, Jarkko; Blomberg, Martti; Saari, Heikki
- 卷第11卷
- 期第2期
- 印刷ISSN1932-5150
- 文件大小3037.99KB
- 发表时间2012-05-25
- DOI10.1117/1.JMM.11.2.023003