发现好书期刊,享受阅读乐趣

海量图书期刊资源,随时随地畅享阅读乐趣

An Ultra-High <i>Q</i> Silicon Cantilever Resonator for Thin Film Internal Friction and Young's Modulus Measurements

An Ultra-High Q Silicon Cantilever Resonator for Thin Film Internal Friction and Young's Modulus Measurements

Metcalf, Thomas H.; Liu, Xiao
  • 期刊名称Solid State Phenomena
  • 作者Metcalf, Thomas H.; Liu, Xiao
  • 卷第184卷
  • 电子ISSN1662-9779
  • 文件大小1852.66KB
  • 发表时间2012-1
  • DOI10.4028/www.scientific.net/SSP.184.325
  • 页码325-330
← 返回【学霸图书馆】主页