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Deposition and Characterization of Nanostructural IrO<sub>x</sub> by RF Sputtering

Deposition and Characterization of Nanostructural IrO_x by RF Sputtering

Tiong, Kwong Kau; Lin, Cheng Hsien; Chen, Yi Min; Huang, Ying Sheng; Lee, Kuei Yi; Tsai, Dah Shyang

期刊名称Solid State Phenomena
作者Tiong, Kwong Kau; Lin, Cheng Hsien; Chen, Yi Min; Huang, Ying Sheng; Lee, Kuei Yi; Tsai, Dah Shyang
卷第194卷
电子ISSN1662-9779
文件大小1473.26KB
发表时间2012-11
DOI10.4028/www.scientific.net/SSP.194.129
页码129-132

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