Overview Design Method of MEMS Devices System
- 期刊名称Advanced Materials Research
- 作者Zhang, Huan; Chen, Chao; Wang, Tao; Ma, Shu Min; Deng, Ya Nan; Zhou, Hong Xi
- 电子ISSN1662-8985
- 文件大小289.32KB
- 发表时间2012-11
- DOI10.4028/www.scientific.net/amr.591-593.63
- 页码63-66
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