Particle-in-Cell/Monte Carlo Collision Simulations of Striations in Inductively Coupled Plasmas
- 期刊名称Japanese Journal of Applied Physics
- 作者Denpoh, Kazuki
- 卷第51卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小903.30KB
- 发表时间2012-9-28
- DOI10.1143/JJAP.51.106202
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