SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Design for Manufacturability through Design-Process Integration VI - Design-of-experiments based design rule optimization
- 作者Kagalwalla, Abde Ali; Muddu, Swamy; Capodieci, Luigi; Zelnik, Coby; Gupta, Puneet; Mason, Mark E.
- 卷第8327卷
- 印刷ISSN0277-786X
- 文件大小627.08KB
- 发表时间2012
- DOI10.1117/12.918067
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