Low temperature deposition of low stress silicon nitride by reactive magnetron sputtering

• 期刊名称Journal of Physics: Conference Series
• 作者Mousinho, A P; Mansano, R D; Zambom, L S; Passaro, A
• 卷第370卷
• 电子ISSN1742-6596
• 文件大小564.99KB
• 发表时间2012-06-19
• DOI10.1088/1742-6596/370/1/012015