SPIE Proceedings [SPIE 16th International Workshop on Physics of Semiconductor Devices - Kanpur, India (Monday 19 December 2011)] 16th International Workshop on Physics of Semiconductor Devices - MEMS deformable mirrors: technology and applications
- 作者Gupta, Amita; Singh, R.; Chaudhary, Monika; Kumar, Shailesh; Meena, A. K.; Katiyar, Monica; Mazhari, B.; Mohapatra, Y N.
- 卷第8549卷
- 印刷ISSN0277-786X
- 文件大小423.07KB
- 发表时间2012
- DOI10.1117/12.925268
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