Diffusion of Transition Metals in 4H-SiC and Trials of Impurity Gettering
- 期刊名称Applied Physics Express
- 作者Danno, Katsunori; Saitoh, Hiroaki; Seki, Akinori; Shirai, Takayuki; Suzuki, Hiroshi; Bessho, Takeshi; Kawai, Yoichiro; Kimoto, Tsunenobu
- 卷第5卷
- 期第3期
- 印刷ISSN1882-0778
- 电子ISSN1882-0786
- 文件大小1674.75KB
- 发表时间2012-3-2
- DOI10.1143/APEX.5.031301
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