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$Oxidation Rate Reduction of Ge with O$_{2}$ Pressure Increase$

Oxidation Rate Reduction of Ge with O$_{2}$ Pressure Increase

Lee, Choong Hyun; Tabata, Toshiyuki; Nishimura, Tomonori; Nagashio, Kosuke; Toriumi, Akira

期刊名称Applied Physics Express
作者Lee, Choong Hyun; Tabata, Toshiyuki; Nishimura, Tomonori; Nagashio, Kosuke; Toriumi, Akira
卷第5卷
期第11期
印刷ISSN1882-0778
电子ISSN1882-0786
文件大小756.81KB
发表时间2012-11-8
DOI10.1143/APEX.5.114001