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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - SI-CMOS-MEMS dual mass resonator for extracting mass and spring variations

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - SI-CMOS-MEMS dual mass resonator for extracting mass and spring variations

Fang, Y.-J.; Mukherjee, T.; Fedder, G.K.

作者Fang, Y.-J.; Mukherjee, T.; Fedder, G.K.
文件大小992.51KB
发表时间2013
DOI10.1109/MEMSYS.2013.6474327
页码657-660

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