Microstructure evolution of radio-frequency magnetron sputtered oxide thin films in the Cr–Zr–O system
- 期刊名称Thin Solid Films
- 作者Spitz, Stefanie; Stueber, Michael; Leiste, Harald; Ulrich, Sven; Seifert, Hans Juergen
- 卷第548卷
- 印刷ISSN0040-6090
- 文件大小1066.57KB
- 发表时间2013-12
- DOI10.1016/j.tsf.2013.09.038
- 页码143-149
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