Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling
- 期刊名称Microsystem Technologies
- 作者Jamaludin, Fatin Syazana; Mohd Sabri, Mohd Faizul; Said, Suhana Mohd
- 卷第19卷
- 期第12期
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小849.55KB
- 发表时间2013-12
- DOI10.1007/s00542-013-1912-y
- 页码1873-1888
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