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Residual thermal desorption studies of Ga adatoms on trenched Si(5512) surface

Residual thermal desorption studies of Ga adatoms on trenched Si(5512) surface

Kumar, Praveen; Kumar, Mahesh; Shivaprasad, S.M.
  • 期刊名称Applied Surface Science
  • 作者Kumar, Praveen; Kumar, Mahesh; Shivaprasad, S.M.
  • 卷第282卷
  • 印刷ISSN0169-4332
  • 文件大小804.27KB
  • 发表时间2013-10
  • DOI10.1016/j.apsusc.2013.05.132
  • 页码348-350
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