Multi-technique x-ray and optical characterization of crystalline phase, texture, and electronic structure of atomic layer deposited Hf1−xZrxO2 gate dielectrics deposited by a cyclical deposition and annealing scheme
- 期刊名称Journal of Applied Physics
- 作者Vasić, Relja; Consiglio, Steven; Clark, Robert D.; Tapily, Kandabara; Sallis, Shawn; Chen, Bo; Newby, David; Medikonda, Manasa; Raja Muthinti, Gangadhara; Bersch, Eric; Jordan-Sweet, Jean; Lavoie, Christian; Leusink, Gert J.; Diebold, Alain C.
- 卷第113卷
- 期第23期
- 印刷ISSN0021-8979
- 文件大小2147.46KB
- 发表时间2013
- DOI10.1063/1.4811446
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