Modelling and experimental study of machined depth in AFM-based milling of nanochannels

• 期刊名称International Journal of Machine Tools and Manufacture
• 作者Geng, Yanquan; Yan, Yongda; Xing, Yangming; Zhao, Xuesen; Hu, Zhenjiang
• 卷第73卷
• 印刷ISSN0890-6955
• 文件大小6394.86KB
• 发表时间2013-10
• DOI10.1016/j.ijmachtools.2013.07.001
• 页码87-96