The design, simulation and fabrication of a novel horizontal sensitive inertial micro-switch with low g value based on MEMS micromachining technology

• 期刊名称Journal of Micromechanics and Microengineering
• 作者Wang, Yongliang; Feng, Qu; Wang, Yan; Chen, Wenguo; Wang, Zhaoyu; Ding, Guifu; Zhao, Xiaolin
• 卷第23卷
• 期第10期
• 印刷ISSN0960-1317
• 电子ISSN1361-6439
• 文件大小2175.29KB
• 发表时间2013-10-01
• DOI10.1088/0960-1317/23/10/105013