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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - X-shaped-spring enhanced MEMS electret generator for energy harvesting

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - X-shaped-spring enhanced MEMS electret generator for energy harvesting

Minakawa, Yoshiaki; Chen, Rui; Suzuki, Yuji
  • 作者Minakawa, Yoshiaki; Chen, Rui; Suzuki, Yuji
  • 文件大小917.95KB
  • 发表时间2013
  • DOI10.1109/Transducers.2013.6627250
  • 页码2241-2244
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