Effect of cantilever deformation and tip-sample contact area on AFM nanoscratching
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Geng, Yanquan; Yan, Yongda; Xing, Yangming; Zhang, Qi; Zhao, Xuesen; Hu, Zhenjiang
- 卷第31卷
- 期第6期
- 印刷ISSN2166-2746
- 文件大小1858.96KB
- 发表时间2013
- DOI10.1116/1.4825405
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