[IEEE 2013 26th International Vacuum Nanoelectronics Conference (IVNC) - Roanoke, VA, USA (2013.07.8-2013.07.12)] 2013 26th International Vacuum Nanoelectronics Conference (IVNC) - A MEMS-based resistive vacuum gauge with voltage readout
- 作者Purahmad, M.; Huang, J.; Plakhotnyuk, M.; Zhang, X.; Lee, J.; Behranginia, A.; Yasaei, P.; Durowade, T.; Spratt, K.; Silvestri, M.; Gouk, M.; Cui, X.; Chang, S.; Maamari, K.; Mathur, M.; Solat, A.; Tahiru, H.; Krzyzanowski, N.; Meyer, A.; Counts, J.; Tsang, E.; Strach, N.; Mohedano, I.; Valencia, M.; Raghunathan, A.; Dankovic, T.; Feinerman, A.; Busta, H.
- 文件大小380.75KB
- 发表时间2013
- DOI10.1109/IVNC.2013.6624737
- 页码1-2
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