Cantilever Resonator With Integrated Actuation and Sensing Fabricated Using a Single Step Lithography
- 期刊名称IEEE Sensors Journal
- 作者Mohanasundaram, S. M.; Pratap, Rudra; Ghosh, Arindam
- 卷第13卷
- 期第2期
- 印刷ISSN1530-437X
- 电子ISSN1558-1748
- 文件大小509.09KB
- 发表时间2013-02
- DOI10.1109/jsen.2012.2225045
- 页码440-441
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