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[IEEE 2013 IEEE International Conference on Automation Science and Engineering (CASE 2013) - Madison, WI, USA (2013.08.17-2013.08.20)] 2013 IEEE International Conference on Automation Science and Engineering (CASE) - Monitoring virtual metrology reliability in a sampling decision system

[IEEE 2013 IEEE International Conference on Automation Science and Engineering (CASE 2013) - Madison, WI, USA (2013.08.17-2013.08.20)] 2013 IEEE International Conference on Automation Science and Engineering (CASE) - Monitoring virtual metrology reliability in a sampling decision system

Kurz, Daniel; De Luca, Cristina; Pilz, Jurgen

作者Kurz, Daniel; De Luca, Cristina; Pilz, Jurgen
文件大小356.85KB
发表时间2013
DOI10.1109/coase.2013.6653949
页码20-25

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