Paper No P9: Diffraction on Anisotropic Substrates With Sinosoidal Surface Microrelief
- 期刊名称SID Symposium Digest of Technical Papers
- 作者Merkulov, Alexey Y.; Belyaev, Victor V.; Belyaev, Andrey A.; Gorbunov, Artem A.
- 卷第44卷
- 印刷ISSN0097-966X
- 文件大小268.17KB
- 发表时间2013-09
- DOI10.1002/sdtp.19
- 页码36-38
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