发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping

Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping

Weinreich, Wenke; Wilde, Lutz; Müller, Johannes; Sundqvist, Jonas; Erben, Elke; Heitmann, Johannes; Lemberger, Martin; Bauer, Anton J.
  • 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
  • 作者Weinreich, Wenke; Wilde, Lutz; Müller, Johannes; Sundqvist, Jonas; Erben, Elke; Heitmann, Johannes; Lemberger, Martin; Bauer, Anton J.
  • 卷第31卷
  • 期第1期
  • 印刷ISSN0734-2101
  • 文件大小2198.20KB
  • 发表时间2013
  • DOI10.1116/1.4765047
同标题推荐
同期刊推荐
← 返回【学霸图书馆】主页
© 2026 学霸图书馆 · 让阅读成为习惯