[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - NEMS actuator driven by optical gradient force
Dong, B.; Cai, H.; Tsai, J. M.; Kropelnicki, P.; Randles, A. B.; Tang, M.; Kwong, D. L.; Liu, A. Q.
- 作者Dong, B.; Cai, H.; Tsai, J. M.; Kropelnicki, P.; Randles, A. B.; Tang, M.; Kwong, D. L.; Liu, A. Q.
- 文件大小1400.74KB
- 发表时间2013
- DOI10.1109/transducers.2013.6626913
- 页码900-903