A Post-Complementary Metal Oxide Semiconductor Formation Process of High-Adhesiveness SU-8 Structures for Reliable Fabrication of Integrated Microelectromechanical System Sensors
- 期刊名称Japanese Journal of Applied Physics
- 作者Maeda, Yusaku; Terao, Kyohei; Suzuki, Takaaki; Shimokawa, Fusao; Takao, Hidekuni
- 卷第52卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小6598.76KB
- 发表时间2013-06-01
- DOI10.7567/JJAP.52.06GL18
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