Tensor Evaluation of Stress Relaxation Profile in Strained SiGe Nanostructures on Si Substrate
- 期刊名称ECS Transactions
- 作者Tomita, M.; Kosemura, D.; Usuda, K.; Ogura, A.
- 卷第53卷
- 期第1期
- 印刷ISSN1938-6737
- 电子ISSN1938-5862
- 文件大小206.41KB
- 发表时间2013-05-03
- DOI10.1149/05301.0207ecst
- 页码207-214
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